Download PDF by Geraldine Cogin Shwartz,Geraldine C. Schwartz,Kris V.: Handbook of Semiconductor Interconnection Technology, Second

By Geraldine Cogin Shwartz,Geraldine C. Schwartz,Kris V. Srikrishnan

ISBN-10: 1574446746

ISBN-13: 9781574446746

First brought a few decade in the past, the 1st version of the Handbook of Semiconductor Interconnection Technology turned commonly renowned for its thorough, built-in therapy of interconnect applied sciences and its forward-looking standpoint. the sector has grown drastically in the intervening time and plenty of of the "likely instructions" defined within the first variation are actually regular in glossy amenities. Reflecting these advances, this variation delves into the sensible points of interconnections for production. It examines the interconnect and fabrication applied sciences now to be had, with an exam of destiny customers for the field.

What's in this Edition:

  • Detailed dialogue of electrochemical gear for plating copper

  • Information on instruments used for evaporation, chemical vapor deposition, and plasma processes

  • Emphasis on dimension of mechanical and thermal houses of insulators

  • Methods for characterizing porous dielectric skinny films

  • Greater specialize in integration concerns and homes of titanium, cobalt, and nickel silicides

  • Process schemes in line with the elevated want for without borderlines touch gates and source/drain

  • Expanded dialogue on offerings for low-dielectric insulators

  • Concentration on electroplated copper, in particular morphology of plated motion pictures and their properties

  • Developments in skinny movie liners and barriers

  • Expanded fabric on copper reliability
  • Show description

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    Handbook of Semiconductor Interconnection Technology, Second Edition by Geraldine Cogin Shwartz,Geraldine C. Schwartz,Kris V. Srikrishnan

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